Process for manufacturing ITO alloy articles
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United States of America Patent
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Sep 26, 2000
Grant Date -
N/A
app pub date -
Jun 12, 1998
filing date -
Aug 31, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a process for manufacturing a pore free powder metallurgical alloy article starting with a minor portion of Sn powder and a major portion of In.sub.2 O.sub.3 powder and comprising the steps of: substantially uniformly distributing and fixing the Sn powder on the surface of the In.sub.2 O.sub.3 powder by mixing and milling the powders in the presence of a process controlling agent such as an alcohol to form alloyed powders, and compacting the so alloyed powders at high temperature to form the article. The article has a good electrical conductivity and is usable as a target for plasma sputtering ITO compositions.
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