Turbo molecular pump
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United States of America Patent
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Sep 26, 2000
Grant Date -
N/A
app pub date -
Jul 17, 1998
filing date -
Jul 22, 1997
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Abstract
In a turbo molecular pump having a rotor magnetically supported in a non-contact manner by a magnetic bearing, a pump controller has a magnetic bearing controller having a programmable digital signal processor. This digital signal processor not only controls the magnetic bearing, but also controls the heater, thus serving as a temperature regulator.
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