Integrated circuit probe card inspection system
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United States of America Patent
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-
Sep 12, 2000
Issued Date -
N/A
app pub date -
Jan 21, 1997
filing date -
Jun 4, 1993
priority date (Note) -
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Abstract
A system for inspecting integrated circuit probe cards using a video camera positioned to view probe points on the cards from below. A precision movement stage is used to move the video camera into a known position for viewing the probe points. Analysis of the video image and the stage position are used to determine the relative positions of the probe points.
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