Method of fine feature edge tuning with optically-halftoned mask
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Sep 5, 2000
Grant Date -
N/A
app pub date -
Apr 6, 1998
filing date -
Nov 24, 1997
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A photolithography mask for optically transferring a lithographic pattern corresponding to an integrated circuit from the mask onto a semiconductor substrate by use of an optical exposure tool. The mask comprises a plurality of features corresponding to elements forming the integrated circuit, and a plurality of non-resolvable biasing segments disposed on an edge of at least one of the features.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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ASML NETHERLANDS B V | 5500 AH VELDHOVEN |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Chen, J Fung | Cupertino, CA | 9 | 558 |
# of filed Patents : 9 Total Citations : 558 | |||
Laidig, Tom | Point Richmond, CA | 3 | 277 |
# of filed Patents : 3 Total Citations : 277 | |||
Wampler, Kurt E | Sunnyvale, CA | 26 | 1125 |
# of filed Patents : 26 Total Citations : 1125 |
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Patent Citation Ranking
- 237 Citation Count
- G03F Class
- 98.11 % this patent is cited more than
- 25 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Jul 11, 2017 | I | Issuance | |
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Oct 01, 2016 | AS | ASSIGNMENT | free format text: MERGER AND CHANGE OF NAME;ASSIGNORS:CITIZEN HOLDINGS CO., LTD.;CITIZEN WATCH CO., LTD.;REEL/FRAME:041626/0791 Owner name: CITIZEN WATCH CO., LTD., JAPAN Effective Date: Oct 01, 2016 |
Aug 13, 2015 | P | Published | |
Apr 01, 2015 | AS | ASSIGNMENT | free format text: CHANGE OF NAME;ASSIGNOR:CITIZEN MACHINERY MIYANO CO., LTD.;REEL/FRAME:036041/0230 Owner name: CITIZEN MACHINERY CO., LTD., JAPAN Effective Date: Apr 01, 2015 |
Feb 26, 2015 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YANAGIDAIRA, SHIGEO;NAKAYA, TAKAICHI;MATSUMOTO, HITOSHI;AND OTHERS;REEL/FRAME:035244/0599 Owner name: CITIZEN HOLDINGS CO., LTD., JAPAN Effective Date: Feb 26, 2015 free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YANAGIDAIRA, SHIGEO;NAKAYA, TAKAICHI;MATSUMOTO, HITOSHI;AND OTHERS;REEL/FRAME:035244/0599 Owner name: CITIZEN MACHINERY MIYANO CO.,, JAPAN Effective Date: Feb 26, 2015 free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YANAGIDAIRA, SHIGEO;NAKAYA, TAKAICHI;MATSUMOTO, HITOSHI;AND OTHERS;REEL/FRAME:035244/0599 Owner name: MITSUBISHI ELECTRIC CORPORATION, JAPAN Effective Date: Feb 26, 2015 |
Oct 03, 2013 | F | Filing | |
Oct 10, 2012 | PD | Priority Date |

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