Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipment
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United States of America Patent
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Aug 22, 2000
Issued Date -
N/A
app pub date -
Jun 25, 1999
filing date -
Jul 10, 1995
priority date (Note) -
Expired
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Abstract
This invention presents an automatic calibration system and method for calibration of a substrate temperature sensor in a thermal processing equipment, such as a rapid thermal processing system. The calibration system includes a temperature-sensitive probe associated with the substrate temperature sensor to calibrate the substrate temperature sensor and an actuator to position the temperature-sensitive probe relative to the substrate during a calibration cycle. The actuator and temperature-sensitive probe of the automatic calibration system can be incorporated into the thermal processing equipment in order to maintain the thermal processing equipment cleanliness and integrity during a calibration cycle, and to allow rapid automated calibration. In the preferred embodiment of this invention, the temperature-sensitive probe and its actuator are implemented in the gas showerhead assembly of a rapid thermal processing system.
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