Method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method
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United States of America Patent
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Aug 15, 2000
Grant Date -
N/A
app pub date -
Dec 30, 1997
filing date -
Mar 10, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a method for manufacturing a micromachined structure to be at least partly released from a substrate surface. A surface contact area, over which structure and the said substrate surface are in surface contact with each other during the manufacturing step, is divided into at least a first and a second contact zone, the adhesiveness between the structure and the substrate being greater in the first contact zone than in the second contact zone. As a manufacturing step, or as a step subsequent to the manufacturing, the structure can be released from the substrate surface at least over said second contact zone. The completed structure may also be completely loose from the substrate. The invention is also directed to a micromachined structure manufactured according to the method.
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