Symmetrical CVD coater with lower upstream exhaust toe
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Aug 15, 2000
Grant Date -
N/A
app pub date -
Dec 29, 1998
filing date -
Jan 19, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus and method for coating a surface of a sheet of glass by deposition of a coating material on the surface as the sheet is conveyed past the apparatus. The apparatus consists of a supply line for supplying a gaseous precursor mixture. The precursor mixture is applied to the surface of a sheet of glass through a chamber. The chamber includes an inlet connected to the supply line and an outlet adjacent the sheet of glass. The apparatus also includes an upstream exhaust tower including a passageway for exhausting unreacted portions of the gaseous precursor mixture and an upstream exhaust toe positioned a specific height above the glass surface. Lastly, the apparatus includes a downstream exhaust tower including a passageway for exhausting unreacted portions of the gaseous precursor mixture and a downstream exhaust toe positioned a specific height above the glass surface which is greater than the height at which said upstream exhaust toe is positioned. The distance between the outlet of said chamber and the passageway in said upstream exhaust tower is approximately equal to the distance between the outlet of said chamber and the passageway in said downstream exhaust tower.
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