Non-contact holder for wafer-like articles
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 8, 2000
Grant Date -
N/A
app pub date -
Nov 25, 1998
filing date -
May 31, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
|
US Family Size
|
Non-US Coverage
|
Patent Longevity
|
Forward Citations
|
Abstract
A holder for wafer-like articles is formed by providing a platform having a wafer-like article facing surface that includes at least one annular groove therein. The annular groove has a ceiling surface therein which is provided with an opening. A gas conducting conduit is connected to the opening. A gas, which introduced into the conduit, exits the conduit through the opening. By choosing a particular orientation of the conduit relative to the annular groove, the gas exiting the opening can be caused to circulate in a clockwise or counter clockwise fashion. The circular flow of gas causes the formation of a vortex adjacent to the article facing surface. A wafer-like article may be held in a suspended state adjacent to the wafer-like article facing surface without contact by the vortex and the gas flowing between the wafer-like article and the article facing surface.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date | Type | Sub-Type |
|---|
International Classification(s)
- 1998 Application Filing Year
- B25J Class
- 142 Applications Filed
- 57 Patents Issued To-Date
- 40.15 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 48 Citation Count
- B25J Class
- 92.95 % this patent is cited more than
- 25 Age