Microscopic element manufacturing method and equipment for carrying out the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jul 25, 2000
Grant Date -
N/A
app pub date -
May 20, 1999
filing date -
Aug 12, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A mask with a microscopic pin-hole having a circular configuration with a diameter of 1 nm to 10 .mu.m or a rectangular configuration with a side of 1 nm to 10 .mu.m is arranged opposite to a substrate. A magnetic material composing a magnetic microdevice is deposited on the substrate through the pin-hole of the mask to form the magnetic microdevice having fine structure on the substrate. By moving the substrate and mask relative to each other in an X-Y plane parallel with the surface of the substrate in a stepwise manner, a plurality of microelements may be formed on the substrate in a matrix form. By moving the substrate and mask relative to each other during the deposition, an elongated microelement may be formed. The rectangular pin-hole of the mask is formed by stacking grid-meshes for use in an electron microscope such that rectangular openings formed in the gridmeshes are aligned in a diagonal direction. The mask may be formed by a diaphragm for use in a transmission electron microscope. The circular pin-hole may be formed by projecting a focussed ion-beam upon a metal foil.
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