Shower head
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 18, 2000
Grant Date -
N/A
app pub date -
Jun 15, 1998
filing date -
Jun 16, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention relates to showerheads for delivering gases to reactor chambers. The showerhead 18 comprises a casing 19, which includes a backing plate 20, first and second baffle plates 21, 22 and an outlet plate 23. Baffle plates 21 and 22 divide the volume defined by the casing 19 into plena 24, 25 and 26. A gas supply 27 feeds the plenum 24, a gas supply 28 feeds the plenum 25 and a further gas supply 29 feeds the plenum 26. The outlet plate 23 has an array of openings 30 and each of the baffle plates 21, 22 has a tube for each opening 31. The tubes and outlets together define concentric but separate outlets for the respective plena.
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