Glass substrate inspection apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 11, 2000
Grant Date -
N/A
app pub date -
Jun 21, 1999
filing date -
Jun 21, 1999
priority date (Note) -
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Abstract
An optical inspection station for inspecting a substrate. The substrate may include a first surface and a second surface. Light is reflected from both the first and second surfaces of the substrate. The light reflected from the first surface is detected by a light detector. A controller may determine a surface characteristic of the first surface from the detected light. The system may include a spatial filter that filters the light reflected from the second surface. The spatial filter eliminates the optical noise that may be created by the light reflected from the second surface.
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