Method of manufacturing thin metal membranes

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United States of America Patent

PATENT NO 6086729
SERIAL NO

09171439

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Abstract

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Method for manufacturing a composite membrane structure comprising a thin metal membrane, for example of silver, palladium or palladium alloys, for use in selective diffusion of gasses. The metal material for the membrane is applied by sputtering as a coating on a base member having a low surface roughness, to a desired thickness of the resulting coating. The coating is pulled off from the base member so as to form the metal membrane, and the metal membrane is placed on a supporting substrate.

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Patent Owner(s)

Patent OwnerAddress
SINTEF7034 TRONDHEIM

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bredesen, Rune Oslo, NO 5 39
Klette, Hallgeir Skulestadmo, NO 3 27

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