Computer controlled optical system for angular alignment of structures using moire patterns
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United States of America Patent
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Jun 13, 2000
Issued Date -
N/A
app pub date -
Aug 12, 1997
filing date -
Jul 21, 1993
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Expired
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Abstract
A computer controlled optical system for angular alignment of structures which uses an optical imaging system input to a computer to synthesize regularly spaced reference and test line patterns replicated from binarized edges taken from the optical images of structures to be aligned. The two patterns are then combined resulting in an interference pattern in which the spacing of moire fringes indicates the amount of movement of the structures required to bring them to a predetermined alignment. All of the procedures are observable on the interference display. These moire fringe pattern are a quantitative measure of angular alignment between the reference and test images and of the edges from the structures from which they were taken. An operator programmed and controlled template automatically processes moire edge alignment measurements. An automatic template processor generates a test sequence template from the chosen areas for measurement by the operator. A template memory module having a library of test sequence templates allows the process to be run without the selection of areas to be measured by the operator. Process imaging and logic operations are utilized in generating the automatic test sequence template.
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