Pad tape surface polishing method and apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6068542
SERIAL NO

08882468

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A surface polishing method comprises allowing a holder to hold a flat sheet-like workpiece, placing a pad tape in a location opposite to the holder, the pad tape consisting of a tape substrate and grains bonded to the substrate surface, supplying free grains between the holder and the pad tape, and rotating the holder and/or a mechanism holding the tape, thereby causing the free grains to polish the workpiece. An apparatus for practicing the method comprises a holder capable of holding a flat sheet-like workpiece, a tape holding mechanism located opposite to the surface of the workpiece and carrying a pad tape which consists of a tape substrate and grains bonded to the substrate, a rotary mechanism for rotating the holder and/or the tape holding mechanism, and an abrasive supplying mechanism for supplying free grains between the surface of the workpiece and the pad tape. The apparatus may further comprise a tape conveying mechanism for feeding the pad tape intermittently and/or a rocking mechanism for rocking the holder or the tape holding mechanism. The rotary mechanism maybe designed to cause eccentric motion or planetary motion of the holder.

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Patent Owner(s)

Patent OwnerAddress
TOMOE ENGINEERING CO LTD A JAPANESE CORPDAINI MARUZEN BUILDING 9-2 NIHONBASHI 3-CHOME CHUO-KU TOKYO
SANSHIN CO LTD A JAPANESE CORPORATION1-11 HEIJIMA NAGAOKA-SHI NIIGATA-KEN

International Classification(s)

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  • 1997 Application Filing Year
  • B24B Class
  • 606 Applications Filed
  • 279 Patents Issued To-Date
  • 46.04 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances1997199819992000200120022003200420050255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hosokai, Nobukazu Nagaoka, JP 4 58

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Patent Citation Ranking

  • 51 Citation Count
  • B24B Class
  • 98.78 % this patent is cited more than
  • 25 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges141703812532101 - 1011 - 2021 - 3031 - 4041 - 5051 - 60100 +0102030405060708090100110120130140150160170180

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