Device for adjusting space between chip in semiconductor chip tester
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United States of America Patent
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May 30, 2000
Grant Date -
N/A
app pub date -
Sep 30, 1998
filing date -
Nov 8, 1997
priority date (Note) -
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Abstract
Device for adjusting a space between chips in a semiconductor chip tester, is disclosed, including a carrier plate mounted movable along a horizontal guide rail, a mounting plate fixed to the carrier plate, an elevating plate mounted on the mounting plate movable in up and down direction by a vertical LM (linear motion) guider, a cam shaft rotatably mounted on the elevating plate, the cam shaft having a plurality of cam grooves formed in a radial direction in an outer circumferential surface, a driving mechanism for rotating the cam shaft, and a plurality of pick-up members each fitted movable in a horizontal direction by a horizontal LM guider in a state a top of each of the pick-up members is inserted in one of the cam grooves.
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