Large area imager with photo-imageable interface barrier layer
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United States of America Patent
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May 9, 2000
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Jan 23, 1998
filing date -
Jan 23, 1998
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Abstract
This invention is related to a radiation image (e.g. X-ray imager) including a thin film transistor (TFT) array, and method of making same. A photo-imageable interface barrier layer is provided between an array of collector electrodes and a photoconductor layer so as to simplify the process for manufacturing the imager and to improve image uniformity. In certain embodiments, the barrier layer is a negative resist. In certain embodiments, the barrier layer and an insulating layer over the TFTs may be of the same photo-imageable material.
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