Semiconductor wafer carrier having the same composition as the wafers
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
May 2, 2000
Grant Date -
N/A
app pub date -
Dec 9, 1998
filing date -
Dec 10, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The described embodiments of the present invention provide a wafer boat that is manufactured using polysilicon. A further embodiment of the invention is a mechanical boat manufacturing technique which avoids the use of welding and other forms of bonding. Another embodiment of the present invention is a polysilicon wafer boat that is formed with a plurality of spaced parallel rods having slots for supporting a series of semi-conductor wafers in a generally edgewise, spaced, parallel position. The rods are mechanically held in place at each end by a plate and capturing mechanism. In yet another embodiment of the invention, polysilicon rods are machined to a tight tolerance with openings in end pieces of the boat. The rods are held firmly in place by polysilicon wedges. This makes for a very rigid structure. If so desired, the boat can then be coated with a layer of polysilicon in a furnace to better lock the parts together.
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