Magnetically enhanced microwave plasma generating apparatus
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United States of America Patent
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Apr 25, 2000
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N/A
app pub date -
Feb 27, 1998
filing date -
Sep 26, 1997
priority date (Note) -
Expired
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Abstract
There is provided a plasma generating apparatus comprising: a waveguide for guiding a microwave; a vacuum vessel connected to the waveguide, having a means for supplying a gas for discharging electrons and a means for evacuating; and a dielectric member in a tube-like shape or a rod-like shape which is inserted in the vacuum vessel, wherein the dielectric member is provided with a means for emitting the microwave, whereby it is possible to apply the electric power of microwave effectively to plasma of high density exceeding so-called cut-off density and to homogenize the distribution of plasma in the vacuum vessel.
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