Method and device for production of high-precision, continuous streams of mixed gas
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United States of America Patent
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Apr 11, 2000
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N/A
app pub date -
Dec 22, 1998
filing date -
Dec 22, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a gas mixing system for producing high-precision, continuous streams of mixed gas consisting of a plurality of individually metered gas components, with an individual gas line including a pressure reducing element and, if desired, a precision pressure regulator for each gas component, precision is further improved by providing that each gas line lead to a separate valve which is timed by electronic control means, the valves being connected at the input side via a jointly vented system of lines for pressure equalization, and communicating at the output side via a mixed gas line with a mixing chamber downstream thereof.
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