Barium strontium .beta.-diketonates, processes for producing the same and processes for producing barium strontium-containing oxide dielectric films with the use of the same
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United States of America Patent
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Apr 4, 2000
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N/A
app pub date -
Feb 17, 1999
filing date -
Apr 17, 1998
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Expired
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Abstract
Novel one-source compounds for producing (Ba,Sr)TiO.sub.3 films having high dielectric constants and ferroelectric (Sr,Ba)Nb.sub.2 O.sub.6 films by the CVD method, which are in the form of a liquid at the source temperature and contain Ba and Sr at a specified ratio; processes for producing these novel compounds; and processes for producing films by using the same. Because of having a melting point of 160.degree. C., being in the form of a liquid and having enough vapor pressure at 200.degree. C., the novel compounds barium strontium .beta.-diketonate [Ba.sub.2 Sr(dpm).sub.6 and BaSr.sub.2 (dpm).sub.6 ] can be quantitatively supplied by gas bubbling as a feedstock in the CVD method while maintaining the Ba/Sr ratio at a constant ratio. Thus, barium strontium-containing oxide dielectric films can be produced at a high reproducibility by thermal decomposition on a substrate in an oxidative atmosphere. These compounds can be produced by reacting dpmh with Ba and Sr, Ba(dpm).sub.2 with Sr(dpm).sub.2, or dpmH with Ba and Sr(dpm).sub.2 and then subjecting either of the reaction products thus obtained to high-vacuum distillation.
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