Piezoelectrically actuated fluid pumps
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United States of America Patent
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-
Mar 28, 2000
Issued Date -
N/A
app pub date -
Apr 3, 1998
filing date -
Apr 15, 1997
priority date (Note) -
Expired
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Abstract
A piezoelectrically actuated fluid pump including a pump housing, a pump chamber, inlet and outlet ports for communicating the pump chamber with the exterior of the pump housing, valving means for opening and closing the ports, two pre-stressed piezoelectric diaphragm members which are self-actuated, and energizing means is provided. The diaphragm members include a prestressed piezoelectric element which is durable, inexpensive and lightweight as compared with diaphragm members of prior diaphragm pumps of comparable discharge capacity, and is actuated via electrical signals from an outside power source. No exterior mechanical means for driving the diaphragm members is necessary. A modification is disclosed in which a central computer independently controls the phase angle of oscillation of the two diaphragm members, providing precise flow rate control.
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