Cleaning method utilizing degassed cleaning liquid with applied ultrasonics
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United States of America Patent
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Mar 21, 2000
Grant Date -
N/A
app pub date -
Jul 3, 1997
filing date -
Jul 4, 1996
priority date (Note) -
Expired
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Abstract
A cleaning method comprising the steps of degassing gas dissolved in a cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Also included, is a cleaning method comprising the steps of: degassing gas dissolved in a surface-active agent-containing cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Water vapor may be used to sweep gas from a degassing device.
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