Probe station for low current, low voltage parametric measurements using multiple probes
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Feb 29, 2000
Grant Date -
N/A
app pub date -
Jun 26, 1998
filing date -
Jul 15, 1997
priority date (Note) -
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Abstract
A probe station has probe manipulators with probe supports disposed around a cover assembly with an inspection opening. Each probe support has a vertical tube extending through an opening in the cover assembly and a horizontal adjustable member extending radially inwardly and supporting a probe holder. Each such horizontal member may be angularly and longitudinally adjusted with respect to its vertical tube. Pairs of coaxial guarding cables run inside the vertical tubes and make Kelvin connections to the probe holders.
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