Phosphorus effusion source
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United States of America Patent
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Feb 29, 2000
Issued Date -
N/A
app pub date -
Jul 3, 1997
filing date -
Feb 14, 1997
priority date (Note) -
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Abstract
This invention is a sublimating and cracking apparatus for producing a beam of molecules to be deposited on a substrate, and an apparatus which is particularly useful with phosphorus as the source material. In the phosphorus effusion cell of this invention, a vacuum jacket encloses and supports a red phosphorus crucible, a condensing crucible for white phosphorus and a connecting tube within a vacuum space. In use, red phosphorus is first transformed and deposited as white phosphorus in the condensing chamber. The white phosphorus is then directed to a cracker section where it is cracked and subsequently directed to the substrate.
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