Method and apparatus for detecting emitted radiation from interrupted electrons
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United States of America Patent
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Feb 22, 2000
Grant Date -
N/A
app pub date -
Nov 28, 1994
filing date -
Nov 28, 1994
priority date (Note) -
Expired
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Abstract
A system for evaluating defects and determining unknown parameters is provided which includes an AC source (10) coupled to a device under test (36). A radiation detector (16) detects radiation emitted from interrupted electrons flowing in the surface of the device under test (36). An analyzer (18) is coupled to the detector (16) for analyzing the output of the detector (16). A processor and memory system (38) is coupled to the analyzer (18) to assist in making determination as to defects or unknown properties of the device under test (36).
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