Method for producing a higher silane

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United States of America Patent

PATENT NO 6027705
SERIAL NO

09201874

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Abstract

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A method for producing tri- or higher-silane from mono- or lower-silane characterized by reacting a lower silane in the first reaction zone and reacting a portion or all of the reaction product thereof in a reaction zone of the second or subsequent reaction zone.

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Patent Owner(s)

Patent OwnerAddress
SHOWA DENKO K K13-9 SHIBA DAIMON 1-CHOME MINATO-KU TOKYO 1058518 ?1058518

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kitsuno, Yu Chichibu, JP 1 67
Matsuhira, Shinya Kawanuma-gun, JP 6 119
Nakajo, Tetsuo Kawasaki, JP 19 241
Tazawa, Syoichi Kawasaki, JP 1 67
Yano, Kotaro Chiba, JP 122 3239

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