Field emission display and method of making same
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United States of America Patent
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Feb 8, 2000
Grant Date -
N/A
app pub date -
Nov 6, 1996
filing date -
Nov 6, 1996
priority date (Note) -
Expired
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Abstract
A low temperature method of sharpening the emission tip of a field emission display includes the step of oxidizing the silicon substrate and the emission tip in an atmosphere of oxygen and ozone at temperatures below 800.degree. C. The oxidation step forms an oxide layer on the emission tip without significant flow of oxide or silicon during oxidation. The oxide layer is subsequently etched to expose the emission tip.
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