Resonating structure and method for forming the resonating structure
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United States of America Patent
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Feb 8, 2000
Issued Date -
N/A
app pub date -
Feb 28, 1997
filing date -
Jun 7, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A force transducer having a semiconductor substrate including a surface defining a recess, such that the recess has a peripheral boundary and a flexible diaphragm connected to the surface along the peripheral boundary to enclose the recess so that the diaphragm moves in response to changes in a force applied thereto. The force transducer also includes a resonant beam connected to the surface adjacent the peripheral boundary. The resonant beam has a frequency of resonation. Movement of the diaphragm in response to changes in the force applied to the diaphragm changes the frequency of resonation of the resonant beam.
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