Method of and an apparatus for photothermally examining workpiece surfaces
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United States of America Patent
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-
Feb 1, 2000
Grant Date -
N/A
app pub date -
May 29, 1997
filing date -
Jun 10, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of photothermally examining workpiece surfaces, wherein an electromagnetic exciting beam is directed from a measuring unit to a point to be measured on the workpiece surface so as to heat the workpiece surface at that point and, furthermore, the heat radiation emitted from the point to be measured is detected and analyzed, is characterized in that a plurality of selected points to be measured on the workpiece surface are irradiated by at least a partial beam of the exciting beam, and the heat rays issuing from the points to be measured are sensed and subjected to joint analysis.
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