Automated washing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jan 25, 2000
Grant Date -
N/A
app pub date -
Mar 5, 1993
filing date -
Mar 5, 1993
priority date (Note) -
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Abstract
A system and a method for washing objects, such as cassettes and carriers used to hold and transport silicon wafers during manufacture of semiconductor chips. The method employs the steps of exposing to ultraviolet radiation the objects in a process chamber, spraying of developer fluid onto the objects, rinsing the objects, spraying of surfactant solution on the objects, rinsing the objects and drying the objects using heated, ionized ULPA filtered air. Apparatus for accomplishing the above is disclosed.
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