Process control by transient thermography
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United States of America Patent
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Jan 11, 2000
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Feb 10, 1998
filing date -
Feb 10, 1998
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A method and apparatus for detecting, locating, isolating and controlling variations in the manufacturing process by transient thermography. A heat source imparts heat to a surface which is radiated in the infrared region. Infrared sensors are coupled to a processor which tracks the physical characteristics of the sample, and provides feedback to a central process controller to make adjustments to the manufacturing process.
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