Wafer having a laser mark on chamfered edge
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United States of America Patent
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-
Dec 21, 1999
Grant Date -
N/A
app pub date -
Mar 9, 1998
filing date -
Mar 11, 1997
priority date (Note) -
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Abstract
A wafer 1 has a chamfered edge 2 polished to specular glossiness, and a laser mark for indication of crystal orientation is put on the chamfered edge 2. Another laser mark 4 for indication of specification, production number, identification, etc. may be carved as a bar code on the chamfered edge 2. These marks 3, 4 are carved on the chamfered edge 2 by laser marking which does not put any harmful influences on the wafer 1.
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