Family

Loading Family data...

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
QUANTUM GLOBAL TECHNOLOGIES LLC	123 N MAIN STREET DUBLIN PA 18917

International Classification(s)

• B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bishop, Phillip W	1433 E. Butler Cir., Chandler, AZ 85225	1	137
# of filed Patents : 1 Total Citations : 137
Harrover, Alexander J	Tempe, AZ	2	214
# of filed Patents : 2 Total Citations : 214

Cited Art Landscape

Load Citation

• No Cited Art to Display

Loading Cited Art Landscape...

Patent Citation Ranking

• 137 Citation Count
• B08B Class

• 99.39 % this patent is cited more than
• 26 Age

Forward Cite Landscape

Load Citation

• No Forward Cites to Display

Loading Forward Cite Landscape...

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 6004400

Carbon dioxide cleaning process

---

Abstract

---

A method for cleaning parts employed during the processing of semiconductor wafers includes a first cleaning step for removing super-micron particles and a second cleaning step for removing sub-micron particles. The second step utilizes frozen carbon dioxide pellets and removes contaminant particles have a size of less than one micron. The cleaning method consistently removes substantially all sub-micron particles from a work surface.

---

 

---

Description

---

Claims

---

Claims data not available

---

Legal Events