Amorphous hard carbon film and mechanical parts coated therewith
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United States of America Patent
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Dec 14, 1999
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N/A
app pub date -
Oct 23, 1997
filing date -
Jun 11, 1993
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Abstract
An amorphous hard carbon film deposited on a substrate wherein the film further contains silicon and nitrogen. A method for deposition of an amorphous hard carbon film containing silicon and nitrogen on a substrate wherein a carbon source, a silicon source and a nitrogen source are introduced in a deposition chamber in which the substrate are placed to deposit the film on said substrate. A mechanical part having a slidable member or slidable members wherein the slidable member(s) is coated with the above amorphous hard carbon film. A method for the use of the above amorphous hard carbon film wherein the film is coated on the surface of a slidable member of a mechanical part.
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