Apparatus for coating a web on a rotating drum by plasma assisted vapor deposition
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United States of America Patent
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Nov 30, 1999
Grant Date -
N/A
app pub date -
Oct 28, 1996
filing date -
Nov 24, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A crucible (4) in a vacuum chamber (3) holds material to be evaporated, such as a metal or metal oxide or a mixture of a metal and a metal oxide, and a coating roll (6) guides a film web (8) a certain distance away from the material to be evaporated. A chamber (9, 10) is provided on each side of the coating roll (6) which carries the film web (8) past the crucible (4), a magnetron cathode (11, 12) connected to a medium-frequency source (19) being provided in each chamber. Each of the two chambers (9, 10) is connected by its own channel (13, 14) to a coating zone (20) directly between the coating roll (6) and the crucible (4), and each chamber (9, 10) is connected by a pressure line (21, 22) to a source (23, 24) of process gas.
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