Lens focus shift sensor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5991004
SERIAL NO

08627892

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A focus shift sensor includes a light source which directs light through a first grating to form a pattern of light. The pattern is directed through the lens which images the pattern at a second grating. The two gratings have different periods such that the second grating generates a pattern of Moire fringes which are projected onto a CCD array. The second grating is preferably tilted with respect to the plane of the image of the pattern from the first grating such that only a portion of the second grating is within the range of focus of the lens. As a result, a pattern of shortened Moire fringes is produced. As the range of focus shifts along the second grating, the Moire fringes move along the CCD array. The movement of the fringes is tracked and the system is adjusted to maintain the location of the focal plane of the lens at a desired location.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Johnson, Shepard D Andover, MA 33 1104
Wallace, John D Newburyport, MA 10 430

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