Membrane test probe
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United States of America Patent
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Nov 23, 1999
Grant Date -
N/A
app pub date -
Jan 16, 1998
filing date -
Jan 16, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A membrane test probe for an integrated circuit has a support frame, an annular substrate fixed to the support frame, and a flexible membrane fixed to and stretched tightly across the annular substrate. The membrane has an intermediate area that includes a plurality of probe contacts on its lower surface that are configured and arranged to be pressed against contact pads of an integrated circuit to be tested. A plurality of conductive traces are connected to the button contacts and configured and arranged for connection to test circuitry. The membrane test probe also includes a support plate for engaging an upper surface of the intermediate area and an adjustment mechanism for leveling the support plate and tensioning the membrane. The adjustment mechanism includes an adjustment ring, a lever ring and a pressure plate frame. The pressure plate frame engages the support plate and urges the same against the intermediate area of the membrane. The lever ring has a plurality of radial levers that push against the pressure plate frame at a plurality of spaced locations, and the support ring has a plurality of individually adjustable plungers deflecting respective radial levers for leveling the support plate and tensioning the membrane.
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