Tinoxide thin film, preparation thereof, and gas detecting sensor using thereof
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United States of America Patent
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Nov 23, 1999
Grant Date -
N/A
app pub date -
Feb 14, 1996
filing date -
Aug 4, 1995
priority date (Note) -
Expired
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Abstract
The present invention relates to tinoxide thin film, a process for manufacturing thereof comprising the step of depositing tin while providing oxygen or ionized oxygen around a substrate, and relates to a gas detecting sensor prepared by the use of such tinoxide thin film.
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