Flow control valve utilizing sonic nozzle
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United States of America Patent
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Nov 23, 1999
Grant Date -
N/A
app pub date -
Nov 28, 1997
filing date -
Mar 27, 1997
priority date (Note) -
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Abstract
A flow control valve for a semiconductor manufacturing process, which valve utilizes a pressure sensor between the flow control valve and a subsequent sonic nozzle to detect the gas pressure which is fed back to the valve to control the flow through the valve.
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