Creating surface topography on an electrostatic chuck with a mandrel
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United States of America Patent
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Nov 16, 1999
Grant Date -
N/A
app pub date -
Jul 1, 1996
filing date -
Jul 1, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention includes an electrostatic chuck having surface topography and a method of making the same including the steps of providing a first insulative layer and a conductive layer laminated thereto. The first insulative layer is secured to a pedestal. A second insulative layer is deposited over the conductive layer and the first and second insulative layer and the copper layer are laminated together by a mandrel. The mandrel has recesses formed therein to produce an electrostatic chuck having a surface topography including raised features. The mandrel may have an annular groove defined therein for producing a raised gasket defined in the second insulative layer.
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