Super-precision positioning system
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United States of America Patent
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Nov 16, 1999
Grant Date -
N/A
app pub date -
Mar 24, 1997
filing date -
Mar 25, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A positioning system comprises a feeding mechanism having three or more feeding units disposed in a moving direction of a moving body. Each of the feeding units has first and second moving elements for clamping and unclamping the moving body, feeding the moving body in the moving direction from an initial position to a target position, and returning the moving body to the initial position. A memory device stores preselected phase and amplitude values of the first and second moving elements. A calculating device calculates phase and amplitude command values for the first and second moving elements based on the phase and amplitude values stored in the memory device. An output device outputs driving command values to the first and second moving elements based on the calculation result of the calculating device. A control device controls the feeding units to clamp the moving body by all of the feeding units after the moving body has been moved to the target position.
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