Method and apparatus measuring edges on a workpiece

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United States of America Patent

PATENT NO 5982491
SERIAL NO

08954633

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Abstract

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The invention is directed to a method and an apparatus for measuring the edges 13 of a workpiece 5 with an optical probe 4. The probe 4 measures the distance values (a) between the probe 4 and an adjustable scanning point 15. In the method, the scanning point 15 is moved along a loop path (36a, 36b, . . . , 36n) over the edge 13 of the workpiece 5 to be measured in order to obtain more exact values for measured points of the edge at a higher measuring speed. During the method, distance values (a) are measured by the probe 4 and a point P of the edge 13 is determined from the course of the measured values.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBHCARL-ZEISS-STRASSE 22 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beck, Rolf Esslingen, DE 12 61
Breyer, Karl-Hermann Heidenheim, DE 17 1037
Gotz, Klaus-Dieter Serheim, DE 4 76

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