Fork cover for vertical furnace
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United States of America Patent
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-
Nov 9, 1999
Grant Date -
N/A
app pub date -
Sep 27, 1996
filing date -
Sep 27, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A semiconductor wafer carrier fork cover to prevent damage to prevent breakage of the semiconductor wafer carrier forks mounted on a robotic semiconductor wafer transfer system during preventative maintenance procedures is described. A semiconductor wafer carrier fork cover has a lower support unit. The lower support unit will fit onto the base of a robotic semiconductor wafer transfer system. An upper covering unit is integrally attached to the lower support unit and will shield the semiconductor wafer carrier forks during preventive maintenance procedures.
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