Method and apparatus for rapidly varying the operating temperature of a semiconductor device in a testing environment
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United States of America Patent
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Nov 2, 1999
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N/A
app pub date -
May 28, 1996
filing date -
May 28, 1996
priority date (Note) -
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Abstract
An apparatus for varying a temperature of a device under test (DUT). The apparatus comprises a plate having a surface area configured to couple to the DUT to transfer heat to and from the DUT by way of conduction. A heat exchanger is connected to the plate to set a temperature of the surface area of the plate to one of a range of temperatures by way of conduction. The heat exchanger circulates a plurality of fluids that each have a different nominal temperature, and the flow rates of the fluids are adjustable to vary the temperature of the surface area of the plate, thereby varying the temperature of the DUT.
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