Method of making white diamond film
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United States of America Patent
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Nov 2, 1999
Issued Date -
N/A
app pub date -
Jan 30, 1998
filing date -
May 19, 1995
priority date (Note) -
Expired
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Abstract
Diamond film with substantially no non-diamond carbon and a high thermal conductivity is deposited by means of a direct current arc jet apparatus with a substrate temperature below about 975 degrees Celsius, an arc power of between about 20 and 40 kw. A pressure of about 12 torr, and an enthalpy greater than 30 from a activated gas jet fed with hydrogen and methane, the methane being supplied at a concentration of less than 0.07%. The resulting material has a high transparency and thermal conductivity. Also disclosed is the use of the diamond material made by the present method for cutting tool applications, particularly milling.
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