Surface inspection apparatus
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United States of America Patent
Stats
-
Oct 26, 1999
Grant Date -
N/A
app pub date -
Apr 13, 1998
filing date -
Apr 15, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A device enabling an inspector to inspect a surface of a photomask etc. without holding the photomask manually, and enabling him/her not to lose his/her sight of any defect of the surface even if the surface is tilted. The device includes a hemispherical support, with its open side upward, which is supported so as to slidably move along a spherical surface with a point S as its center, an X-Y stage which is fixed onto the hemispherical support, a rotation unit which is mounted onto the X-Y stage, a support plate which is supported onto the rotation unit, a lighting device which lights up a part of a photomask, on the support plate, corresponding to the spot S and its vicinity. The support plate can be tilted about the spot S.
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Cited Art Landscape
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