Fluid control apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5967489
SERIAL NO

08982583

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Abstract

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A connecting member connected to an extension of a massflow controller has attached thereto a gatelike member to hold the connecting member from opposite sides thereof. The gatelike member has a pressing member for pressing the extension against the connecting member from immediately above a seal portion between the extension and the connecting member.

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Patent Owner(s)

Patent OwnerAddress
HITACHI METALS LTD2-70 KONAN 1-CHOME MINATO-KU TOKYO 108-0075

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakazawa, Masahiko Omiya, JP 47 167
Tanaka, Hisashi Osaka, JP 69 752
Tsukada, Kazuo Omiya, JP 8 76
Yamaji, Michio Osaka, JP 158 3238

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