Method for manufacturing thermal-type infrared sensor

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United States of America Patent

PATENT NO 5966590
SERIAL NO

08960216

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a method of manufacturing a thermal-type infrared sensor including a thermosensitive part, a bolometer material is formed as the thermosensitive part and is subjected to post-processing to control a temperature coefficient of resistance in the bolometer material. The bolometer material may be formed by titanium or vanadium.

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Patent Owner(s)

  • NEC CORPORATION;DIRECTOR GENERAL, TECHNICAL RESEARCH & DEVELOPMENT INSTITUTE, JAPAN DEFENSE AGENCY;TECHNICAL RESEARCH AND DEVELOPMENT INSTITUTE JAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nagashima, Mitsuhiro Tokyo, JP 5 52
Oda, Naoki Tokyo, JP 60 574
Sasaki, Tokuhito Tokyo, JP 19 109
Wada, Hideo Tokyo, JP 55 559

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