Passive alignment of components with micromachined tool
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United States of America Patent
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Oct 12, 1999
Issued Date -
N/A
app pub date -
Sep 11, 1997
filing date -
Oct 5, 1993
priority date (Note) -
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Abstract
A method of fabricating an electronic device uses a micromachined tool that has openings which receive and align components with respect to each other and a substrate. The tool has fiducial marks which align to fiducial marks on the substrate, thereby producing precise alignment of the tool and the substrate. The components are then inserted into the openings, thereby insuring their alignment with respect to the substrate.
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