Infrared sensor and infrared detector
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United States of America Patent
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Oct 5, 1999
Grant Date -
N/A
app pub date -
Jun 12, 1997
filing date -
Jun 12, 1996
priority date (Note) -
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Abstract
A chip-shaped infrared sensor comprising a substrate formed with a cavity, an infrared radiation receiving portion supported in the form of a micro air bridge in the cavity by four hook-shaped beam portions extending from the substrate, two thermistor films for infrared radiation detection formed on the infrared radiation receiving portion, two thermistor films for temperature compensation arranged on the substrate, and a single thermistor film arranged on the substrate for detecting temperature of the substrate.
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